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TMA

TMA is a broadly used aluminum precursor for deposition of thin films incorporated into memory, logic, and III-V semiconductor architectures.

  • Chemical Name: Aluminum, trimethyl-

  • CAS No: 75-24-1

  • Molecular Weight: 72.1 g/mol

  • Appearance: Liquid

  • Color: Colorless

  • Boiling Point: 125°C

  • Viscosity: 0.9 cP at 30°C