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PCpZr

Zirconium precursor used to make thin film ZrO2 utilized in advanced memory and logic semiconductors.

  • Chemical Name: Tris(N-methylmethanaminato)[(1,2,3,4,5-η)-1-propyl-2,4-cyclopentadien-1-yl]zirconium

  • CAS No: 2192174-63-1

  • Molecular Weight: 330.63 g/mol

  • Appearance: Liquid

  • Color: Pale Yellow

  • Boiling Point: 254 ℃ (101.3 kPa)

  • Viscosity: 7.21 cP (at 25℃)