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CpHf

Hafnium precursor is used to make thin films of HfO2 for dielectrics in advanced memory and logic semiconductors.

  • Chemical Name: (η5-2,4-Cyclopentadien-1-yl)tris(N-methylmethanaminato)hafnium

  • CAS No: 941596-80-1

  • Molecular Weight: 375.81 g/mol

  • Appearance: Liquid

  • Color: Pale Yellow

  • Boiling Point: 300.4℃

  • Viscosity: 8.2 cP at 25 ℃