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BTBAS

Silicon precursor for silicon nitrides and silicon oxides thin films incorporated into advanced logic and memory semiconductor architectures.

  • Chemical Name: N,N'-Bis(1,1-dimethylethyl)silanediamine

  • CAS No: 186598-40-3

  • Molecular Weight: 174.36 g/mol

  • Appearance: Liquid

  • Color: Colorless

  • Boiling Point: 166℃

  • Viscosity: Not Available