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BDEAS
Silicon precursor for silicon nitrides and silicon oxides thin films incorporated into advanced logic and memory semiconductor architectures.
Chemical Name: Bis(diethylamino)silane
CAS No: 27804-64-4
Molecular Weight: 174.36 g/mol
Appearance: Liquid
Color: Colorless
Boiling Point: 188℃
Viscosity: 0.82cp